Department of Mechanical Science & Engineering,Mechanical Engineering Science,Mechano-Informatics and Systems

Course: Mechanical Engineering
Department of Mechanical and Aerospace Engineering, Faculty of Engineering
Course: Mechanical Engineering Science, Mechano-Informatics and Systems
Department of Mechanical Science and Engineering, Graduate School of Engineering

Laboratories,Nagoya University Department of Mechanical Science & Engineering

HOME > Laboratories > Micromachining and MEMS Group

Micromachining and MEMS Group

MEMS devices based on micro-nano machining

  • Prof. Seiichi Hata
  • Assoc. Prof. Junpei Sakurai
  • Assist. Prof. Mizue Mizoshirimail

We are aiming at integration of mechanical, electrical and optical functions in a small domain; for example on a silicon chip and a film, by means of micro-nano machining technologies. In-depth research on micromachining processes such as etching and deposition allows us to fabricate novel MEMS (Micro-Electro-Mechanical Systems) devices, including sensors and actuators. Through these activities, we are contributing to the establishment of the knowledge base for MEMS technology, and to produce novel MEMS devices.

Micromachining and MEMS Group
Micromachined micro-needle array for transdermal drug delivery system

◆Microfabrication for 3-D micro-nano structures
◆Evaluation of mechanical properties of MEMS materials
◆Microsensors and their industrial applications
◆Microactuators and their industrial applications
◆MEMS devices for bio-medical applications

Movie:Micromachining and MEMS Group

Office room

Furo-cho, Chikusa-ku, Nagoya, 464-8603, JAPAN
Graduate School and School of Engineering
School of Engineering Bild.2 Room 343
MAP

TEL :+81-(0)52-789-3301
FAX :+81-(0)52-789-3111
Mail:mech@mech.nagoya-u.ac.jp